Abstract
Because of their small size and high reliability, microelectromechanical (MEMS) devices have the potential to revolution many areas of engineering. As with conventionally-sized engineering design, there is likely to be a demand for the automated design of MEMS devices. This paper describes our current status as we progress toward our ultimate goal of using an evolutionary algorithm and a generative representation to produce designs of a MEMS device and successfully demonstrate its transfer to an actual chip. To produce designs that are likely to transfer to reality, we present two ways to modify evaluation of designs. The first is to add location noise, differences between the actual dimensions of the design and the design blueprint, which is a technique we have used for our work in evolving antennas and robots. The second method is to add prestress to model the warping that occurs during the extreme heat of fabrication. In future we expect to fabricate and test some MEMS resonators that are evolved in this way.
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References
Bentley, P.J. (ed.): Evolutionary Design by Computers. Morgan Kaufmann, San Francisco (1999)
Bentley, P.J., Corne, D.W. (eds.): Creative Evolutionary Systems. Morgan Kaufmann, San Francisco (2001)
Hornby, G.S.: ALPS: The age-layered population structure for reducing the problem of premature convergence. In: M.K., et al. (eds.) Proc. of the Genetic and Evolutionary Computation Conference, GECCO 2006, Seattle, WA, pp. 815–822. ACM Press, New York (2006)
Hornby, G.S., Lipson, H., Pollack, J.B.: Generative representations for the automatic design of modular physical robots. IEEE Transactions on Robotics and Automation 19(4), 703–719 (2003)
Kamalian, R., Zhou, N., Agogino, M.: A comparison of mems synthesis techniques. In: Proceedings of the 1st Pacific Rim Workshop on Transducers and Micro/Nano Technologies, pp. 239–242 (2002)
Li, H., Antonsson, E.K.: Genetic algorithms in MEMS synthesis. In: Proceedings of IMECE 1998 ASME International Mechanical Engineering Congress and Expositions (1998)
Li, H., Antonsson, E.K.: Mask-layout synthesis through an evolutionary algorith. In: Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators. IEEE, Los Alamitos (1999)
Lohn, J.D., Hornby, G.S., Linden, D.S.: Rapid re-evolution of an X-band antenna for NASA’s space technology 5 mission. In: Yu, T., Riolo, R.L., Worzel, B. (eds.) Genetic Programming Theory and Practice III, ch. 5. Genetic Programming, vol. 9, pp. 65–78. Springer, Ann Arbor (2005)
Lohn, J.D., Kraus, W.F., Hornby, G.S.: Automated design of a MEMS resonator. In: Srinivasan, D., Wang, L. (eds.) IEEE Congress on Evolutionary Computation, Singapore, pp. 3486–3491 (2007)
Ma, L., Antonsson, E.K.: Automated mask-layout and process synthesis for MEMS. In: Proceedings of the International Conference on Modeling and Simulation of Microsystems, pp. 20–23 (2000)
McConaghy, T., Palmers, P., Gielen, G.G.E., Steyaert, M.: Genetic programming with reuse of known designs for industrially scalable, novel circuit design. In: Riolo, R.L., Worzel, B. (eds.) Genetic Programming Theory and Practice V, ch. 10. Kluwer, Ann Arbor (2007)
Michalewicz, Z., Dasgupta, D., Riche, R.G.L., Schoenauer, M.: Evolutionary algorithms for constrained engineering problems. Computers and Industrial Engineering Journal 30(2), 851–870 (1996)
Osiander, R., Darrin, M.A.G., Champion, J.L. (eds.): MEMS and Microstructures in Aerospace Applications. Taylor and Francis Group, Boca Raton (2006)
Patel, S., Clack, C.: ALPS evaluation in financial portfolio optimisation. In: Srinivasan, D., Wang, L. (eds.) IEEE Congress on Evolutionary Computation, Singapore, pp. 813–819 (2007)
Robinson, G., El-Beltagy, M., Keane, A.: Optimization in mechanical design. In: Bentley, P.J. (ed.) Evolutionary Design by Computers, ch. 6, pp. 147–165. Morgan Kaufmann, San Francisco (1999)
Zhou, N.: Simulation and Synthesis of MicroElectroMechanical Systems. PhD thesis, University of California, Berkeley (2002)
Zhou, N., Agogino, A.M., Pister, K.S.J.: Automated design synthesis for micro-electro-mechanical systems (MEMS). In: Proceedings of the ASME Design Automation Conference (2002)
Zhou, N., Zhu, B., Agogino, A.M., Pister, K.S.J.: Evolutionary synthesis of microelectromechanical systems (MEMS) design. In: Proceedings of ANNIE 2001: IEEE Neural Networks Council and Smart Engineering Systems Laboratory, vol. 11, pp. 197–202. ASME Press (2001)
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Hornby, G.S., Kraus, W.F., Lohn, J.D. (2008). Evolving MEMS Resonator Designs for Fabrication. In: Hornby, G.S., Sekanina, L., Haddow, P.C. (eds) Evolvable Systems: From Biology to Hardware. ICES 2008. Lecture Notes in Computer Science, vol 5216. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-85857-7_19
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DOI: https://doi.org/10.1007/978-3-540-85857-7_19
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