Modeling and temperature control of rapid thermal processing
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- @Article{Dassau:Mat:06,
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author = "Eyal Dassau and Benyamin Grosman and Daniel R. Lewin",
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title = "Modeling and temperature control of rapid thermal
processing",
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journal = "Computers and Chemical Engineering",
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year = "2006",
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volume = "30",
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number = "4",
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pages = "686--697",
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month = "15 " # feb,
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keywords = "genetic algorithms, genetic programming, Rapid thermal
processing (RTP), Non-linear model predictive control
(NMPC), GA, GP",
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URL = "http://tx.technion.ac.il/~dlewin/publications/rtp_paper_v9.pdf",
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DOI = "doi:10.1016/j.compchemeng.2005.11.007",
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size = "28 pages",
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abstract = "In the past few years, rapid thermal processing (RTP)
has gained acceptance as mainstream technology for
semiconductor manufacturing. This single wafer approach
allows for faster wafer processing and better control
of process parameters on the wafer. However, as feature
sizes become smaller, and wafer uniformity demands
become more stringent, there is an increased demand
from rapid thermal (RT) equipment manufacturers to
improve control, uniformity and repeatability of
processes on wafers. In RT processes, the main control
problem is that of temperature regulation, which is
complicated due to the high non-linearity of the
heating process, process parameters that often change
significantly during and between the processing of each
wafer, and difficulties in measuring temperature and
edge effects. This paper summarises work carried out in
cooperation with Steag CVD Systems, in which algorithms
for steady state and dynamic temperature uniformity
were developed. The steady-state algorithm involves the
reverse engineering of the required power distribution,
given a history of past distributions and the resulting
temperature profile. The algorithm for dynamic
temperature uniformity involves the development of a
first-principles model of the RTP chamber and wafer,
its calibration using experimental data, and the use of
the model to develop a controller.",
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notes = "cf \cite{Dassau:thesis}",
- }
Genetic Programming entries for
Eyal Dassau
Benyamin Grosman
Daniel R Lewin
Citations