The role of process system engineering (PSE) in integrated circuit (IC) manufacturing

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@Article{Lewin:2006:CEP,

• author = "Daniel R. Lewin and Sivan Lachman-Shalem and Benyamin Grosman",
• title = "The role of process system engineering (PSE) in integrated circuit (IC) manufacturing",
• journal = "Control Engineering Practice",
• year = "2006",
• volume = "15",
• number = "7",
• pages = "793--802",
• month = jul,
• note = "Special Issue on Award Winning Applications, 2005 IFAC World Congress",
• keywords = "genetic algorithms, genetic programming, Integrated circuit manufacturing, Process systems engineering, Model-based control, Process monitoring, Yield enhancement",
• DOI = "doi:10.1016/j.conengprac.2006.04.003",
• abstract = "The manufacture of integrated circuits is driven by a demand for faster calculation capabilities and lower costs, which will require the development of a new generation of manufacturing tools to increase yield productivity, spearheaded by improved measurement devices and advanced process control. The objectives of this paper are to review of the challenges in applying two areas of expertise in process systems engineering (PSE), namely process monitoring and control, and to motivate more academics working in PSE to get actively involved. PSE solutions appropriate for these challenges involve harnessing multivariate statistics, automated modelling approaches like genetic programming, and multivariable model-based control. The paper is illustrated with several example applications, all tested in fabrication facilities in Israel.",

}

Genetic Programming entries for Daniel R Lewin Sivan Lachman-Shalem Benyamin Grosman

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