Multiobjective lot scheduling and dynamic OHT routing in a 300-mm wafer fab

Created by W.Langdon from gp-bibliography.bib Revision:1.7662

@InProceedings{Yang:2008:ieeeSMC,

• author = "Jia-Wei Yang and Hsueh-Chien Cheng and Tsung-Che Chiang and Li-Chen Fu",
• title = "Multiobjective lot scheduling and dynamic OHT routing in a 300-mm wafer fab",
• booktitle = "IEEE International Conference on Systems, Man and Cybernetics, SMC 2008",
• year = "2008",
• month = oct,
• pages = "1608--1613",
• keywords = "genetic algorithms, genetic programming, automated material handling system, dispatching rules, doing tool-to-tool direct delivery, dynamic OHT routing, dynamic routing method, less-congested path, multiobjective genetic programming based rule generator, multiobjective lot scheduling, near-shortest path, overhead hoist transports routing, size 300 mm, traffic congestion reduction, wafer fabrication facility, combinatorial mathematics, dispatching, materials handling, scheduling, semiconductor device manufacture",
• DOI = "doi:10.1109/ICSMC.2008.4811517",
• ISSN = "1062-922X",
• abstract = "In this paper, we solve two problems in a 300-mm wafer fabrication facility (fab). Firstly, for the lot scheduling problem, we propose a multi-objective genetic programming based rule generator (MOGPRG) to evolve useful dispatching rules, which can provide near-optimal lot schedules concerning multiple objectives. Secondly, the overhead hoist transports (OHT) routing problem is considered. As the modern automated material handling system (AMHS) is capable of doing tool-to-tool direct delivery, the congestion of OHTs may happen more often than the past. To deal with the traffic congestion in AMHS, a dynamic routing method is proposed to find the near-shortest and less-congested path for the OHT to travel along. It can reduce the traffic congestion and achieve fast lot delivery by adapting to the dynamic traffic environment. The proposed MOGPRG is integrated with the dynamic routing method to improve two fab performance metrics: mean cycle time and tardy rate. Experimental results show the effectiveness of the proposed MOGPRG and dynamic routing method.",
• notes = "Also known as \cite{4811517}",

}

Genetic Programming entries for Jia-Wei Yang Hsueh-Chien Cheng Tsung-Che Chiang Li-Chen Fu

Citations