Evolving MEMS Resonator Designs for Fabrication
Created by W.Langdon from
gp-bibliography.bib Revision:1.8098
- @InProceedings{DBLP:conf/ices/HornbyKL08,
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author = "Gregory Hornby and William F. Kraus and
Jason D. Lohn",
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title = "Evolving MEMS Resonator Designs for Fabrication",
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booktitle = "Proceedings of the 8th International Conference
Evolvable Systems: From Biology to Hardware, ICES
2008",
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year = "2008",
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editor = "Gregory Hornby and Luk{\'a}s Sekanina and
Pauline C. Haddow",
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series = "Lecture Notes in Computer Science",
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volume = "5216",
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pages = "213--224",
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address = "Prague, Czech Republic",
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month = sep # " 21-24",
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publisher = "Springer",
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bibsource = "DBLP, http://dblp.uni-trier.de",
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keywords = "genetic algorithms, genetic programming",
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isbn13 = "978-3-540-85856-0",
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URL = "http://idesign.ucsc.edu/pubs.html",
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DOI = "doi:10.1007/978-3-540-85857-7_19",
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bibsource = "DBLP, http://dblp.uni-trier.de",
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abstract = "Because of their small size and high reliability,
microelectromechanical (MEMS) devices have the
potential to revolution many areas of engineering. As
with conventionally-sized engineering design, there is
likely to be a demand for the automated design of MEMS
devices. Here we present our work in using an
evolutionary algorithm and generative representation to
automatically create designs for a MEMS meandering
resonator and describe what is involved in having these
designs fabricated. To produce designs that are likely
to transfer to reality, we give two ways to modify
evaluation of designs: using fabrication noise,
differences between the actual dimensions of the design
and the design blueprint, which has helped us in our
work in evolving antennas and robots; and including
prestress, to model the warping that occurs during the
extreme heat of fabrication. We have had the best
evolved designs fabricated with a commercial MEMS
fabrication process and are currently in the process of
testing designs to verify how closely the actual
devices compare to simulation performance.",
- }
Genetic Programming entries for
Gregory S Hornby
William F Kraus
Jason Lohn
Citations