Applications in IC Manufacturing

Created by W.Langdon from gp-bibliography.bib Revision:1.8051

@InProceedings{Lewin:2005:IFAC,

• title = "Applications in IC Manufacturing",
• author = "Daniel R. Lewin and Sivan Lachman-shalem and Benyamin Grosman",
• booktitle = "16th IFAC World Congress",
• year = "2005",
• editor = "Pavel Zitek",
• address = "Prague, Czech Republic",
• month = jul # " 4-8",
• keywords = "genetic algorithms, genetic programming, integrated circuit manufacturing, process systems engineering, model-based control, process monitoring, yield enhancement",
• annote = "The Pennsylvania State University CiteSeerX Archives",
• bibsource = "OAI-PMH server at citeseerx.ist.psu.edu",
• language = "en",
• oai = "oai:CiteSeerX.psu:10.1.1.468.1497",
• rights = "Metadata may be used without restrictions as long as the oai identifier remains attached to it.",
• URL = "http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.468.1497",
• URL = "http://www.nt.ntnu.no/users/skoge/prost/proceedings/ifac2005/Fullpapers/03538.pdf",
• size = "6 pages",
• abstract = "The manufacture of integrated circuits is driven by a demand for faster calculation capabilities and lower costs, which will require the development of a new generation of manufacturing tools to increase yield productivity, spearheaded by improved measurement devices and advanced process control. The objectives of this paper are review of the challenges in two main PSE areas: process monitoring and process control. PSE solutions appropriate for these challenges involve harnessing multivariate statistics, automated modelling approaches like genetic programming, and multivariable model-based control. The paper is illustrated with several example applications, all tested in",
• notes = "http://www.nt.ntnu.no/users/skoge/prost/proceedings/ifac2005/Index.html",

}

Genetic Programming entries for Daniel R Lewin Sivan Lachman-Shalem Benyamin Grosman

Citations