Evolving MEMS Resonator Designs for Fabrication

Created by W.Langdon from gp-bibliography.bib Revision:1.8051

@InProceedings{DBLP:conf/ices/HornbyKL08,

• author = "Gregory Hornby and William F. Kraus and Jason D. Lohn",
• title = "Evolving MEMS Resonator Designs for Fabrication",
• booktitle = "Proceedings of the 8th International Conference Evolvable Systems: From Biology to Hardware, ICES 2008",
• year = "2008",
• editor = "Gregory Hornby and Luk{\'a}s Sekanina and Pauline C. Haddow",
• series = "Lecture Notes in Computer Science",
• volume = "5216",
• pages = "213--224",
• address = "Prague, Czech Republic",
• month = sep # " 21-24",
• publisher = "Springer",
• bibsource = "DBLP, http://dblp.uni-trier.de",
• keywords = "genetic algorithms, genetic programming",
• isbn13 = "978-3-540-85856-0",
• URL = "http://idesign.ucsc.edu/pubs.html",
• DOI = "doi:10.1007/978-3-540-85857-7_19",
• bibsource = "DBLP, http://dblp.uni-trier.de",
• abstract = "Because of their small size and high reliability, microelectromechanical (MEMS) devices have the potential to revolution many areas of engineering. As with conventionally-sized engineering design, there is likely to be a demand for the automated design of MEMS devices. Here we present our work in using an evolutionary algorithm and generative representation to automatically create designs for a MEMS meandering resonator and describe what is involved in having these designs fabricated. To produce designs that are likely to transfer to reality, we give two ways to modify evaluation of designs: using fabrication noise, differences between the actual dimensions of the design and the design blueprint, which has helped us in our work in evolving antennas and robots; and including prestress, to model the warping that occurs during the extreme heat of fabrication. We have had the best evolved designs fabricated with a commercial MEMS fabrication process and are currently in the process of testing designs to verify how closely the actual devices compare to simulation performance.",

}

Genetic Programming entries for Gregory S Hornby William F Kraus Jason Lohn

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