- author = "Stefan-Cristian Nechita and Roland Toth and Koos {van Berkel}",
- title = "Data-driven System Identification of Thermal Systems using Machine Learning",
- journal = "IFAC-PapersOnLine",
- volume = "54",
- number = "7",
- pages = "162--167",
- year = "2021",
- note = "19th IFAC Symposium on System Identification SYSID 2021",
- keywords = "genetic algorithms, genetic programming, Spatial-temporal System Identification, Separation of Variables, Machine Learning, MIMO System Indentification, Tree Adjoining Grammar, Equation Discovery, Gaussian Proccesses",
- ISSN = "2405-8963",
-
URL = "
https://research.tue.nl/en/publications/data-driven-system-identification-of-thermal-systems-using-machin",
-
URL = "
https://pure.tue.nl/ws/portalfiles/portal/192542606/1_s2.0_S2405896321011265_main.pdf",
-
URL = "https://www.sciencedirect.com/science/article/pii/S2405896321011265",
-
DOI = "
doi:10.1016/j.ifacol.2021.08.352",
- size = "6 pages",
- abstract = "The paper addresses the identification of spatial-temporal mirror surface deformations as a result of laser-based heat load within the lithography process of integrated circuit production. The thermal diffusion and surface deformation are modeled by separation of the spatial-temporal effects using data-driven orthogonal decomposition. A novel tree adjoining grammar (TAG) and sparsity enhanced symbolic-regression-based learning methods are deployed to discover temporal dynamics that connect the spatial variation. The resulting data-driven procedure is applied to automatically synthetise a compact model representation of synthetic thermal effects induced mirror surface deformations",
-
notes = "Event 19th IFAC Symposium on System Identification
(SYSID 2021) - Virtual, Padova, Italy Duration: 13 Jul
2021 to 16 Jul 2021 Conference number: 19
https://www.sysid2021.org/
Eindhoven University of Technology",
